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High Sensitivity Micro-machined Piezoresistive Strain Sensor

2014-09Journal article Open access
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datacite.subject.fosEngenharia e Tecnologia
datacite.subject.sdg07:Energias Renováveis e Acessíveis
datacite.subject.sdg09:Indústria, Inovação e Infraestruturas
datacite.subject.sdg11:Cidades e Comunidades Sustentáveis
dc.contributor.authorCaseiro, D.
dc.contributor.authorSantos, S.
dc.contributor.authorFerreira, Carlos Daniel Henriques
dc.contributor.authorNeves, Carlos
dc.date.accessioned2025-07-08T11:53:53Z
dc.date.available2025-07-08T11:53:53Z
dc.date.issued2014-09
dc.descriptionCaseiro, Diamantino António - Scopus ID: 7801376539 Santos, S. - Scopus ID: 21743726000
dc.description28th European Conference on Solid-State Transducers, EUROSENSORS 2014, Brescia, 7 September 2014 - 10 September 2014
dc.description.abstractThis paper presents a micro-machined piezoresistive sensor capable of measuring very small strains. The sensor design, based on piezoresistive sensing technology, was optimized by the numerical method using Finite Element Method (FEM) to enhance sensibility. The high sensibility is achieved through a reduction of section and through the action of the bending moment. As a result, a sensor with a sensitivity of 569.4608 μV/V/με, which can be fabricated by the SensoNor MultiMEMS process, is proposed. Furthermore, practical essays with macro prototypes confirmed and validated the numerical analysis. Such a sensor can be a direct replacement for the strain gauges and its very high sensitivity opens the door to many other applications, that otherwise would not be possible.eng
dc.description.sponsorshipThis work has been partially supported by the Portuguese Foundation for Science and Technology under project grant PEst-OE/EEI/UI308/2014.
dc.identifier.citationD. Caseiro, S. Santos, C. Ferreira, C. Neves, High Sensitivity Micro-machined Piezoresistive Strain Sensor, Procedia Engineering, Volume 87, 2014, Pages 1362-1365, ISSN 1877-7058, https://doi.org/10.1016/j.proeng.2014.11.696.
dc.identifier.doi10.1016/j.proeng.2014.11.696
dc.identifier.issn1877-7058
dc.identifier.urihttp://hdl.handle.net/10400.8/13572
dc.language.isoeng
dc.peerreviewedyes
dc.publisherElsevier
dc.relation.hasversionhttps://www.sciencedirect.com/science/article/pii/S1877705814028185?via%3Dihub
dc.relation.ispartofProcedia Engineering
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/
dc.subjectMEMS
dc.subjectStrain Sensor
dc.subjectPiezoresistive
dc.titleHigh Sensitivity Micro-machined Piezoresistive Strain Sensoreng
dc.typejournal article
dspace.entity.typePublication
oaire.citation.endPage1365
oaire.citation.startPage1362
oaire.citation.titleProcedia Engineering
oaire.citation.volume87
oaire.versionhttp://purl.org/coar/version/c_970fb48d4fbd8a85
person.familyNameHenriques Ferreira
person.familyNameNeves
person.givenNameCarlos Daniel
person.givenNameCarlos
person.identifier0000000133901858
person.identifier.ciencia-idDC15-E18A-8C59
person.identifier.orcid0000-0003-3891-6092
person.identifier.orcid0000-0003-1733-3648
person.identifier.ridF-4684-2014
person.identifier.scopus-author-id26768153200
relation.isAuthorOfPublicationfb21583a-da3e-400e-ab84-3157e5160fde
relation.isAuthorOfPublicationf87e8a37-498d-4ad4-810c-3c89d3171bf0
relation.isAuthorOfPublication.latestForDiscoveryfb21583a-da3e-400e-ab84-3157e5160fde

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This paper presents a micro-machined piezoresistive sensor capable of measuring very small strains. The sensor design, based on piezoresistive sensing technology, was optimized by the numerical method using Finite Element Method (FEM) to enhance sensibility. The high sensibility is achieved through a reduction of section and through the action of the bending moment. As a result, a sensor with a sensitivity of 569.4608 μV/V/με, which can be fabricated by the SensoNor MultiMEMS process, is proposed. Furthermore, practical essays with macro prototypes confirmed and validated the numerical analysis. Such a sensor can be a direct replacement for the strain gauges and its very high sensitivity opens the door to many other applications, that otherwise would not be possible.
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