High Sensitivity Micro-machined Piezoresistive Strain Sensor

Caseiro, D.; Santos, S.; Ferreira, Carlos Daniel Henriques; Neves, Carlos

http://hdl.handle.net/10400.8/13572

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High sensitivity micro-machined piezoresistive strain sensor.pdf	This paper presents a micro-machined piezoresistive sensor capable of measuring very small strains. The sensor design, based on piezoresistive sensing technology, was optimized by the numerical method using Finite Element Method (FEM) to enhance sensibility. The high sensibility is achieved through a reduction of section and through the action of the bending moment. As a result, a sensor with a sensitivity of 569.4608 μV/V/με, which can be fabricated by the SensoNor MultiMEMS process, is proposed. Furthermore, practical essays with macro prototypes confirmed and validated the numerical analysis. Such a sensor can be a direct replacement for the strain gauges and its very high sensitivity opens the door to many other applications, that otherwise would not be possible.	490.38 KB	Adobe PDF	Download

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Authors

Caseiro, D.

Santos, S.

Ferreira, Carlos Daniel Henriques

Neves, Carlos

Abstract(s)

This paper presents a micro-machined piezoresistive sensor capable of measuring very small strains. The sensor design, based on piezoresistive sensing technology, was optimized by the numerical method using Finite Element Method (FEM) to enhance sensibility. The high sensibility is achieved through a reduction of section and through the action of the bending moment. As a result, a sensor with a sensitivity of 569.4608 μV/V/με, which can be fabricated by the SensoNor MultiMEMS process, is proposed. Furthermore, practical essays with macro prototypes confirmed and validated the numerical analysis. Such a sensor can be a direct replacement for the strain gauges and its very high sensitivity opens the door to many other applications, that otherwise would not be possible.

Description

Caseiro, Diamantino António - Scopus ID: 7801376539 Santos, S. - Scopus ID: 21743726000
28th European Conference on Solid-State Transducers, EUROSENSORS 2014, Brescia, 7 September 2014 - 10 September 2014

Keywords

MEMS Strain Sensor Piezoresistive

URI

http://hdl.handle.net/10400.8/13572

Citation

D. Caseiro, S. Santos, C. Ferreira, C. Neves, High Sensitivity Micro-machined Piezoresistive Strain Sensor, Procedia Engineering, Volume 87, 2014, Pages 1362-1365, ISSN 1877-7058, https://doi.org/10.1016/j.proeng.2014.11.696.