Optimized Design of a Piezoresistive Pressure Sensor with Measurement Span of 1MPa

Ferreira, Carlos; Grinde, C.; Morais, R.; Valente, A.; Neves, C.; Reis, M.

http://hdl.handle.net/10400.8/14476

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Abstract(s)

This paper presents a piezoresistive pressure sensor with a measurement span of 1MPa and capable to withstand peak pressures around 10MPa. The sensor design, based on a square membrane, was optimized for enhanced sensitivity, high linearity and low sensitivity variations between fabricated samples. Being the asymmetry of the mechanical stress peaks, the ratio between the membrane area and its thickness, and the tolerances of the bulk micromachining process considered for the optimal positioning of the piezoresistive sensing elements. Practical results show a mean sensitivity of 30.9mV/V/MPa with a standard deviation of 0.65mV/V/MPa and a linearity error of 0.15% of the scale span.

Keywords

MEMS Piezoresistive Pressure Sensor Flat Membrane Design

URI

http://hdl.handle.net/10400.8/14476

Citation

Ferreira, C., Grinde, C., Morais, R., Valente, A., Neves, C., & Reis, M. (2012). Optimized design of a piezoresistive pressure sensor with measurement span of 1 MPa. Procedia Engineering, 47, 1307-1310.